High Temperature 200mm Ion Implanter (PR1293607-2790-W)
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Description & Project Overview
Internal Identifier: PR1293607-2790-W Title: High Temperature 200mm Ion Implanter Description: High Temperature 200mm Ion Implanter Order Type: Supplies Description: High Temperature 200 mm Ion Implanter Options: 3.2.3 Ion source Alternative methods for implanting Al using methods other than evaporation 5.7.2 Channeling implantation in SiC Measuring system to determine the exact orientation of the SiC for channeling implantation 13.4 Maintenance contract Two-year maintenance contract with two options to extend the contract by one year each.
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