High temperature 200 mm ion implanter
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Description & Project Overview
Tenders are invited for High temperature 200 mm ion implanter
Beschreibung: high temperature 200 mm ion implanter
optionen:
3.2.3 ionenquelle alternative verfahren zur implantation von al mit anderen methoden als der verdampfung
5.7.2 channeling-implantation in sic messsystem zur bestimmung der exakten ausrichtung des sic für die channeling-implantation
13.4 wartungsvertrag zweijähriger wartungsvertrag mit zwei optionen zur verlängerung des vertrags um jeweils ein jahr.
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