Germany – Laboratory, optical and precision equipments (excl. glasses) – Atomic Layer Deposition (ALD) System
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Contract Description
The Walther Meissner Institute of the Bavarian Academy of Sciences (WMI) will acquire an Atomic Layer Deposition (ALD) system for producing integrated quantum circuits. The system should be able to conformally coat three-dimensional structures such as TSVs (through-silicon vias) with high aspect ratio (through ALD growth) with a high-quality superconducting film.
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