Spain – Microelectronic machinery and apparatus and microsystems – Supply of ion beam etching system (Ion beam Etching - IBE)
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Description & Project Overview
The equipment will be allocated to the Singular Scientific and Technical Infrastructure (ICTS) MICRONANOFABS, a Spanish network of micro and nanofabrication clean rooms integrated into the National ICTS Map of the Ministry responsible for science, of which the Micro and Nano Manufacturing Infrastructure of the Nanophotonic Technology Center (NTC) of the Universitat Politècnica de València (UPV) is a part, together with the National Microelectronics Center (CSIC) and the ISOM Technology Center (UPM). The installation will be located in the White Room of building 8F of the NTC-UPV. The Technology Center
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